By Dr. Martin von Allmen, Dr. Andreas Blatter (auth.)
Laser-Beam Interactions with Materials treats, from a physicist's standpoint, the wide range of procedures that lasers can result in in fabrics. actual phenomena starting from optics to surprise waves are mentioned, as are functions in such various fields as semiconductor annealing, gap drilling and fusion plasma construction. The method taken emphasizes the basic rules and their interrelations. The newcomer is given the mandatory vital heritage fabric, whereas the energetic learn employee reveals a serious and accomplished evaluation of the field.
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Extra info for Laser-Beam Interactions with Materials: Physical Principles and Applications
Further, we consider the limiting case of a vanishing absorption length (referred to as a surface source), as well as a finite absorption length (penetrating source). Green's functions for these source geometries are given in the Appendix B. In the following we present a number of solutions for the slab and for the semi-infinte solid, for use in later discussions . We shall only consider sources of constant power, being switched on at t = O. For notational convenience, we introduce the diffusion length 0 = 2(Kt) 112.
13 illustrate the action of radial material flow, bulging due to gas-assisted film detachment and hole opening. 13 . 14. 77] 36 Capillary forces are also a key ingredient in laser polishing of ragged surfaces . 73] demonstrated in 1985 a simple and effective method to planarize thin metal films in integrated-circuit interconnect structures. It consists of simply melting the contact by a short laser pulse, causing it to resolidify in a near-planar configuration enforced by its high surface tension.
4]. 2 Solution of the Heat-Flow Equation Let us now look for solutions of the heat-flow equation with allowance for heat production by absorption of laser light. It turns out that a number of rather severe simplifications must be made to arrive at analytical solutions (more accurate numerical calculations will be discussed in Sect. 2). lO). Further, we take all material parameters to be constants! (a requirement to be relaxed somewhat later on). We consider a homogeneous material in the form of a slab between the planes z = 0 and z = L (this includes the semi-infinite solid for which L = (0).